Edm method was adopted to process b - doped diamond film and the process was studied . the morphology and composition of the machined diamond film was analyzed by sem and raman . surface roughness was measured by surface roughness tester 研究了电火花加工、电火花抛光和线切割加工掺硼金刚石膜工艺，对加工后的膜进行了sem分析、 raman分析和已加工表面粗糙度分析。
